The Linde Gases Division, part of The Linde Group, has invested €2.5m in a new manufacturing facility to produce its environmentally-friendly alternative to greenhouse gases used in industrial cleaning processes in the solar industry.
The manufacturing facility, based in Inju City in South Korea, will house next generation on-site fluorine system equipment.
Linde said the new facility aims to meet the increasing global demand for Linde’s fluorine technology, which microelectronics manufacturers are adopting as an alternative to greenhouse gas nitrogen trifluoride.
The group estimates that the investment in the new factory could lead to a carbon dioxide reduction of over three million tonnes for the microelectronics manufacturing industry, where the chemical is used to clean vapour deposition chambers.
The chemical is being increasingly adopted by solar and semiconductor manufacturers, according to Linde.
‘This €2.5m investment in the new state-of-the-art fluorine systems facility is essential to support the continuous growth of our Asian customer base,’ said Carl Jackson, head of Linde Gases’ fluorine business.
The 3,700 square-metre facility integrates equipment assembly and chemical processing, while streamlining manufacturing operations.
Linde operates over 30 fluorine production systems worldwide to meet the needs of chamber cleaning from semiconductor, display and photovoltaic industries.
